High temperature reaction method

Page 1

United States Patent 19 11 Patent Number: 5,628,881 Lemelson (45. Date of Patent: May 13, 1997 54 HIGH TEMPERATURE REACTION (List continued on next page.)

METHOD

FOREIGN PATENT DOCUMENTS

76 Inventor: Jerome H. Lemelson, 868 Tyner Way, 24.6797 4/1962 Australia, Incline Village, Nev. 89450

OTHER PUBLICATIONS

21 Appl. No.: 472,680 "Electronic Micrometer for Thin Material.” Electronics, pp. 22 Filled: Jun. 7, 1995 190,194, 198 (vol. 19, Oct. 1946). "Changes. In Communication,” Science News Letter, p. 102

Related U.S. Application Data (Feb. 16, 1957).

63 Continuation of Ser. No. 849,297, Mar. 10, 1992, Pat. No.

(List continued on next page.)

5,552,675, which is a continuation-in-part of Ser. No. 696, Primary Examiner-Kathryn Gorgos 747, May 7, 1991, Pat. No. 5,131,941, Ser. No. 376,378, Jul. Assistant Examiner-Kishor Mayekar 7, 1989, Pat. No. 5,039,836, and Ser. No. 921,268, Oct 21, Attorney, Agent, or Firm-Niro, Scavone, Haller & Niro 1986, Pat, No. 4,853,514, and a continuation of Ser. No.

643,883, Aug. 24, 1984, abandoned, which is a continuation 57 ABSTRACT

163,203, Jul. 16, 1971, abandoned, which is a continuation A high temperature reaction apparatus for reacting on solid,

422,875, Nov. 25, 1964, Pat. No. 3,461,347, which is a liquid and gaseous materials to change their state and/or continuation-in-part of Ser. No. 710,517, Mar. 5, 1964, chemical compositions. High temperatures are generated abandoned.

within a reaction chamber by means of electrical energy (51 int. C. ... CO1B 3700 applied to electrodes or other means for generating radiant 52 U.S. Cl. ............................................................. 204/164 energy. The radiant energy may be in one or more forms 581 Field of Search ................................... 204/164, 168, such as a beam or a plasma. In a preferred form, the 204/173 apparatus is controlled by a master controller such as a computer which generates control signals applied to control 56) References Cited the admission of a reaction material or materials to a reaction chamber, the operation of one or more electrical energy to

arrangements, the removal or products of the high tempera 1,700,675 1/1929 Goddard .................................. 126/680 ture reaction from the reaction chamber. Controlled chemi 1957,541 5/1934 Johnson ... ... 123/143 cal and/or physical reactions may thus be effected under 2,137,598 11/1938 Vos ............................................ 102A29 2,423,729 7/1947 Ruhle ........................................ 219/19 computer control to perform such functions as incineration, 2,527,747 10/1950 Lewis et al. . 118/723 EB the production of select chemicals, the refining of metals, the 2,746,420 5/1956 Steigerwald ................................ 11818 comminuting of solids, the vaporization of solid materials or 2,771,568 11/1956 Steigerwald ... 315/31 select portions thereof, the production of select gases from 2,778,926 1/1957 Schneider ..... ... 219/17 vapors and solid materials and the coating of surfaces by 2,787,564 4/1957 Schockley ................................ 148/15 particulate and/or vapor deposition. The apparatus may also 2,793,282 5/1957 Steigerwald .............................. 219,69 be operated to provide combinations of Such processes in a 2,796,734 6/1957 Bodine. ... 60/39.77 single reaction chamber or in a series of chambers joined 2,796,735 6/1957 Bodine ... ... 60/39.77 together for the sequential and continuous processing of 2,816,847 12/1957 Shockley ................................... 437/17 solid, liquid, vaporous and/or gaseous matterfed perse or as 2,869,825 i? 1959 Crawford ................................. 255/18 2,923,590 2/1960 Lorenz ..... ... 34.6/110 a mixture or separate streams thereof. 2,932.588 4/1960 Frank ... 118/723 EB 2,960,457 11/1960 Kuhlman 18/723 EB 6 Claims, 3 Drawing Sheets

Page 2

3,562,141 2/1971 Morley .... ... 204/298 2,968,723 1/1961 Steigerwald ........................... 250/49.5 3,569,660 3/1971 Houdcroft ..... ... 219/121 2.984,307 5/1961 Barnes ..... ... 175/2 3,699,334 10/1972 Cohen et al. ... ... 250/49.5 2.987,610 6/1961 Steigerwald . 219/117 3,749,878 7/1973 Sullivan et al. .................... 219/121. L 2,988237 6/1961 Devol, Jr. ..... 214/ 4,207,154 6/1980 Lemelson ....... 204/1571. S 2,989,614 6/1961 Steigerwald . 219/50 4,655,146 4/1987 Lemelson ................................ 110/346 2,994,801 8/1961 Hanks ...... 315/14 4,831,230 5/1989 Lemelson ... 219/121.2 3,009,050 11/1961 Steigerwald . 29/69 4,853,514 8/1989 Lemelson ... 219/121.2 3,016,449 1/1962 Steigerwald . 19/117 5,039,836 8/1991 Lemelson ... . . 219/12.3 3,020,389 2/1962 Gorman .................................... 29/72 5,064,989 11/1991 Lemelson ............... . 219/121.2 3,033,974 5/1962 Schleich et al. ........................ 219/117 m 5,108,718 4/1992 Dummersdorf et al. ............... 204/169 3,056,881 10/1962 Schwarz ........... 219/121.15 5,131,941 7/1992 Lemelson ............................... 75/10.19 3,067,572 12/1962 Baumgartner ............................... 60/25 5,170,032 12/1992 Lemelson ... 219/121.15

........... 22A57.2 5,231,259 7/1993 Lemelson ... 29/121.12

3,112,850 12/1963 Garibotti ...... ... 225/2 5,308,241 3,117,022 1/1964 Bronson et al. . ... 1177212 HER 3,118,050 1/1964 Hetherington ... ... 219/117 OT PUBLICATIONS 3,119,707 1/1964 Christy ................. ... 117/37 "Microwave Unit May Improve Radar.” Aviation Week, p. 3,134,010 A: Elean et al. a. 67 (vol. 66, No. 7, Feb. 18, 1957).

rewer............. “Maser Development Offers Wider Uses,” Aviation Week, p.

3,140,379 7/1964 et al. . 219/69 3,154,371 10/1964 Johnson ........... ?o. 37 (vol. 66, No. 18, May 6, 1957).

3,163,743 12/1964 Wroth et al. . ... 219/137 Damon, “Maser Shows Promise, Some Drawbacks.” Avia 3,165,619 1/1965 Cohen .......... ... 29/12 tion Week, pp. 76-77,81-82,87, 89 (vol. 67, No. 7, Aug. 19, 3,169,892 2/1965 Lemelson ................................. 14876.3 1957).

3,173,175 3/1965 Lemelson ..... ... 18/26 Damon, “Maser's Potential Rests on Further Work.” Avia 3,177,651 4/1965 Lawrence ... 3 tion Week, pp. 91-92, 96,99, 101, 104 (vol. 67, No. 8, Aug. 3,192,318 6/1965 Schleich et al. . ... 17876.8 26 1957) 3204,087 8/1965 Millis, Jr. ..... ... 235/15 3,205,087 9/1965 Allen ... 219/121.15 Range OfRadio Tel

Ra o Telescopes May Be

May Be Extended

Extended Ten

Ten Times,

3,206,336 9/1965 Hora ......................................... asis Science Digest, p. 19 (Mar 1958).

3,234,044 2/1966 Andes et all 17/212 "Maser Aids Astronomers,” Science News Letters, p. 227 3242,339 3/1966 Lee ................... ... 250/203 (Apr. 12, 1958).

3,244,412 4/1966 Robinson et al. ... 263/40 “Foresee New Method of Transmitting Messages,” Science 3,259,730 7/1966 Wehde et al. ... . . 21969 News Letter, p. 281 (May 3, 1958).

3,267,250 A: E. Jr. ... 23. Klass, "Boom Predicted For Molecular Amplifiers.” Avia 3,272,347 9/19 SO essessessee assesseesaas tion Week, pp. 69,71, 75-76 (vol. 69, No. 22, Dec. 1, 1958). 3,276,902 10/1966 Abraham ...... ... 117/106 3,282,100 11/1966 Baiter ........................................ 73190 Schawlow et al. "Infrared And Optical Masers. Physical 3.291,959 12/1966 Schleich et al. . ... 29/121 Review, pp. 1940-1949 (vol. 112, No. 6, Dec. 15, 1958). 3.293,587 12/1966 Robinson ......... ... 338/300 Gordon, “The Maser.” Scientific American, pp. 42-50 (vol. 3,296,795 f1967 Nielsen 60/39.82 199, No. 6, Dec. 1958).

3,301949 1/1967 Ullery ..................................... 178/68 "Maser Works in Heat,” Science News Letter, p. 7 (Jan. 3, 3,303,319 2/1967 Steigerwald ..... ... 219/21 1959).

3,308264 3/1967 UElery, Jr. ... ... 219/121 9 3,315,110 4/1967 Wang ....... . . 33/84 tity Light Beams,” Science News Letter; p. 83 (Feb. 7, 3,326,176 6/1967 Sibley ...... ... 118/6 ). - 2 3,330,696 7/1967 Ullery, Jr. 1177212 Glenn, "Thermoplastic Recording,” Journal of Applied 3,340,601 9/1967 Garibotti ................................... 29/582 Physics, pp. 1870-1873 (vol. 30, No. 12, Dec. 1959). 3,360,398 12/1967 Garibotti .......... 117/22 Miller, "Optical Systems Have Space Potential.” Aviation 3,364,087 1/968 Solomon et al. ... 156/4 Week, pp. 87, 89, 91 (vol. 71, No. 24, Dec. 14, 1959). 3,371,404 3/1968 Lemelson ......... . .313/348 29/421 Zuckerman, "Cat Eye' Turns Night Into Day," Popular

3,386.857 6/1968 Steinmaier ... 1177212 -- - A - - -1. 3,388,314 6/1968 Gould ........................................ 321/69 Miller, "Low Temperature Coils Cut Maser Size.” Aviation 3,388,461 6/1968 Lins ......................................... 29/610 Week, pp. 76–77 (vol. 72, No. 7, Feb. 15, 1960). 3,398,537 8/1968 Picquendar ................................ 60/254 “Synthetic Ruby Does New Tricks With Light,” Business 3,401,249 9/1968 Schleich et al. .......................... 219/69 Week, p. 102 (Jul 16, 1960).

3,402.278 9/1968 Dernbach .................................. 2969 Miller, "Optical Maser May Aid Space Avionics.” Aviation 3,404,254 10/1968 Jones ........ ... 219/21 Week, pp. 96-97 (vol. 73, No. 3, Jul 18, 1960). 3,422,246 1/1969 Wetzel ......... ... 219/21 Li 8 xy ul 3,426,174 2/1969 Graham et al. ... ... 219/121 ight Amplifier Operated,” Science News Letter; p. 53 (Jul. 3,427,118 2/1969 Andress et al. ...... ... 431/258 23, 1960).

3,443,087 5/1969 Robieux et al. ..... ... 250A19 "Stimulated Optical Radiation. In Ruby.” Nature, pp. 3,448,280 6/1969 Blitchington et al. 250/227 493-494 (vol. 187, No. 4736, Aug. 6, 1960). 3,461,347 8/1969 Lemelson ....... 3170 “The Laser: A Light Amplifier.” Electronics World, p. 39 3,473,879 10/1969 Berberich .................................... 431/1 (vol 64 No 3 Sep 1960).

3,504,063 3/1970 Lemelson .................................. 264/24 A....... c.: 3,513.285 5/1970 mura ....... ... 219/21 Maser Transmits 25 Miles,” Science New Letter, p. 245 3,515,932 6/1970 King ......... ... 313/339 (Oct. 15, 1960).

3,535,488 10/1970 Kitchin ................................ 219/121 “Fantastic Red Spot,” Time, pp. 47-48 (Oct. 17, 1960).

Page 3

Klass, "Optical Maser's Space Potential Probed,” Aviation Bakish, “Introduction to Electron Beam Technology,” Chap Week, pp. 75, 77, 79 (vol. 73, No. 17, Oct. 24, 1960). ter 13, pp. 282-400 (John Wiley & Sons 1962). "Create Light Source BrighterThan Sun's Center." Science Schwarz et al., “Electron, Ion, and Light Beam As Present Digest, pp. 89-91 (vol. 48, No. 4, Oct. 1960). and Future Material Working Tools,” Proceedings of the "Light-Beam Amplifier.” Sky and Telescope, p. 203 (vol. National Electronics Conference, pp. 351,365 (vol. XVIII, XX, No. 4, Oct. 1960). Oct. 8-10, 1962).

"Ruby That Amplifies Light,” Popular Science, pp. 25-26 Schawlow, "Advances In Optical Masers,” Scientific Ameri (Oct. 1960). can, pp. 34-45 (vol. 209, No. 1, Jul. 1963). Grace et al., "the Maser: Receiver for Signals from Space.” Miller et al., “Electron Beam Manufacturing Techniques for Electronic World, pp. 35-38, 120-1 (vol. 64, No. 4, Nov. Integral Device Interconnections,” presented at Western 1960). Electronic Show and Convention (WESCON), San Fran "Optical Masers Made With Calcium Fluoride,” Aviation cisco, California (Aug. 1963).

"Uranium Optical Maser,” Science News Letter, p. 434 (Dec. Miller et al., “Versatile Interconnection Packaging System 31, 1960). for Integral Electronics using Electron Beam Techniques.” Deitchman et al., "Optical Maser,” Scientific American, pp. Presented at National Electronics Conference, Chicago, Illi 80, 82 (vol. 203, No. 6, Dec. 1960). nois, Oct. 1963.

"Maser That Does Everything.” Business Week, p. 20 (Feb. Rischell et al., “Laser Welding for Microelectronic Inter 4, 1961). connections,” Proceedings: 1964 Electronics Components "Continuous-Output Optical Maser Demonstrated by Bell Conference, Washington D.C., pp. 145-151 (May 5-7, Laboratories,” Aviation Week, p. 34 (vol. 74, No. 6, Feb. 6, 1964).

1961). Garibotti et al., “Automation of Electron-Beam Process for "Gaseous Laser Holds Vast Promise,” Missiles and Rockets, Microelectronics.” First International Conference on Elec pp. 38–39 (vol. 8, No. 7, Feb. 13, 1961). tron & Ion Beam Science & Technology, pp. 293-336 Gilmore,"Introducing the Laser:Brightest Light in Electron (Bakish, ed. 1965) (asserted that Conference was on May 5, ics' Future." Popular Electronics, pp. 50-53, 112-113 (vol. 1964).

14, No. 2, Feb. 1961). Namba et al., "Automatic Control of Electron-Beam Micro LaFond, "Lasers For Intergalaxial Contact?,” Missiles and machining.” First International Conference on Electron & Rockets, pp. 32-33 (vol. 8, No. 11, Mar, 13, 1961). Ion Beam Science & Technology, pp. 264-282 (Bakish, ed. K.H. Steigerwald, "Electron Beam Milling,” pp. 269-290 of 1965) (asserted that Conference was on May 5, 1964). R. Bakish, ed., Proceedings of the Third Symposium on R. Bakish et al., Handbook ofElectron Beam Welding, 1964. Electron Beam Processes (Mar. 23-24, 1961).

LaFond, "Laser, Fiber Optics Technologies Join,” Missiles Garibotti et al., "The Micro-Circuit Module-A Versatile and Rockets, pp.33-34, 45 (vol. 8, No. 19, May 8, 1961). Interconnection Packaging System.” Microelectronics and Schawlow, "Optical Masers,” Scientific American, pp. Reliability, pp. 41-53, vol. 4 (1965). 52-61 (vol. 204, No. 6, Jun. 1961). Namba et al., “Electron and Laser Beam Processing.” Japa O'Toole, "MASER: New Electronic Marvel,” Science nese Journal of Applied Physics, vol. 3, No. 9, pp. 536-545 Digest, pp. 33-39 (Jun. 1961). (Sep. 1965).

LaFond, "Laser Seen Replacing Radar In Space Navigation Culver, "The Maser: A Molecular Amplifier for Microwave Within Decade," Missiles and Rockets, pp. 16-17 (vol. 9, Radiation,” Science, p. 810 (vol. 126, No. 3276) (*no date No. 2, Jul. 10, 1961). available).

Klass, "Laser Challenges Radar for Space Use,” Aviation van Ardenne et al., “A New Electron BeamProcessing Plant Week, p. 71 (vol. 75, No. 4, Jul. 24, 1961). for Thin Film Resistors with a Fundamental Equipment of Zaret et al., "Ocular Lesions Produced by an Optical Maser the 80 kV. Type," pp. 841-856, Metallurgical Society Con (Laser).” Science, p. 1525 (vol. 134, No. 3489, Nov. 10, ferences of Electron & Ion Beam Science & Technology, vol. 1961). 2 (Bakish et al., Apr. 1966).

Solon et al., "Physiological Emplications of Laser Beams.” Lengyel, Lasers, John Wiley & Sons, pp. 100-115 (1971) no Science, pp. 1506-1508 (vol. 134, No.3496, Nov. 10, 1961). month available.

"Laser Gun Shoots Light Rays.” Business Week, pp. 46-48

(Dec. 30, 1961). Miller et al., “Electron Beam Welding,” pp. 1-23 (source DeGroat, Metalworking Automation (McGraw-Hill 1962). and date unknown).

Crawford, "Electron Beam Machining," chapter 11 of Bak Schollhammer, "Electron Beam Joining Techniques for ish, ed., Introduction to Electron Beam Technology (John Electronic Packaging,” pp. 386-430 (source and date Wiley & Sons, Inc.) asserted published in 1962. unknown).

Page 4

Drawing sheet — no readable text.

Page 5

Drawing sheet — no readable text.

Page 6

Drawing sheet — no readable text.

Page 7

HGH TEMPERATURE REACTION Another object is to provide an apparatus and method for METHOD reacting on matter with radiation operable to heat molecules CROSS REFERENCE TO RELATED of such matter to a temperature sufficient to break the bonds APPLICATIONS the atoms of such molecules and permit the selective sepa ration of such atoms wherein such apparatus and method

This is a continuation of application Ser. No. 849,297, includes continuously collecting and forming selected of filed Mar. 10, 1992 now U.S. Pat. No. 5,5522,675 which is such atoms, such as metal atoms derived from ore containing a continuation-in-part of Ser. No. 07/696,747 filed May 7, same, to shape.

1991 now U.S. Pat. No. 5,131,941 as a continuation-in-part Another object is to provide an apparatus and method for of Ser. No. 376,378 (filed Jul. 7, 1989) now U.S. Pat. No. 10 reacting on matter defined by carbon atom containing mol 5,039,836, a continuation-in-part of Ser. No. 921.268 (Oct. ecules with 21, 1986) now U.S. Pat. No. 4,853,514, a continuation of such carbonhigh temperature radiation operable to separate Ser. No. 643,883 (Aug. 24, 1984) abandoned, which was a and form same on a from atoms their molecules and to deposited substrate into a synthetic diamond form continuation of Ser. No. 571,188 (Apr. 24, 1975) abandoned, of such carbon.

a continuation of application Ser. No. 163,203 (Jul. 16, 15 1971) abandoned, which was a continuation of Ser. No. Another object is to provide a high temperature reaction 849,013 (Aug. 11, 1969) abandoned, as a continuation of apparatus and method for generating a plurality of plasmas. Ser. No. 422,875 (Nov. 25, 1964), now U.S. Pat. No. Another object is to provide and apparatus and method for 3,461.347 which was a continuation-in part of Ser. No. generating aplasma by means of multiple forms of radiation. 710,517 (Mar. 5, 1964) abandoned. 20

Another object is to provide an apparatus and method for

SUMMARY OF THE INVENTION pyrolizing waste material such as waste products of com This invention relates to an apparatus and method for bustion in furnaces and internal combustion engines. reacting on matter by means of one or more forms of With the above and such other objects in view as may radiation. In a preferred form, the radiation generates and 25 hereinafter for fully appear, the invention consists of toe transfers sufficient energy to the matter to cause a physical novel constructions, combinations and arrangements of parts and/or chemical reaction such as by pyrolosis or electropy as will be more fully described and illustrated in the accom rolosis of select atoms of said matter to change its molecular panying drawings, but it is to be understood that changes, structure or to separate select atoms from molecules thereof variations and modifications may be resorted to which fall by breaking the bonds between such atoms and other atoms 30 within the scope of the invention as claimed. of such molecules. In one form, the method is carried out continuously with respect to matter such as commin-uted BRIEF DESCRIPTION OF THE DRAWINGS metal containing ore, reaction or waste gas, water vapor per se or mixed with gas molecules or solid particles of a FIG. 1 is a side view with parts broken away for clarity catalyst, hydrocarbon molecule containing gas or mixtures 35 of an electron beam apparatus for generating high tempera of gases and/or vapors containing molecules of matter to be ture beam radiation for reacting on matter fed to or inter heated and reacted on. In said preferred form, reactions take sected. by the radiation beam thereof; place attemperatures in the range of 1000 to 2000 degrees FIG. 2 is a side view of an electrode applicable to Centegrade; in one form in the range of about 1700 degrees apparatus of the invention;

centegrade to separate metal atoms from ore molecules FIG. 3 is a side view in cross section of one form of solid containing same in comminuted particles of such ore which structure producible by an apparatus of the type shown in are continuously fed to a reaction Zone in which is generated a plasma. Such process includes continuously forming such FIG. 1;

refined metal to shape by spray depositing same onto a FIG. 4 is a side view of a modified form of structure of the moving substrate or a shaping means such as a continuous 45 type shown in FIG. 3;

casting die, mold or rolling mill. Other high temperature FIG. 5 is a sectioned side view of a hollow beam reactions include the continuous formation of carbon or generating apparatus applicable to the apparatus of FIG. 1; synthetic diamond particles or coatings on a moving sub FIG. 6 is a sectioned side view of a modified form of the strate from carbon atoms stripped from molecules of a gas or vapor containing same. Other forms of the invention 50 apparatus shown in FIG. 5;

include the high temperature disassociation of hydrogen FIG. 7 is a cross sectional view of anotherform of hollow from oxygen atoms and the incineration or pyrolizing of beam apparatus applicable to the apparatus of FIG. 1; products of combustion such as waste gases and solid particles therein, vaporized waste liquids and the like. The of FIG. 8 is an end view with parts broken away for clarity invention is also defined by improvements in apparatus and 55 which project intoreaction an elongated the chamber employing electrodes chamber;

methods for generating high temperatures.

Accordingly it is a primary object of this invention to FIG. 9 is an end view with parts,broken away and sectioned for clarity of an elongated reaction chamber provide an apparatus and method for processing matter by employing means of high temperature radiation. plasma generating electrodes which are space Another object is to provide an apparatus and method for separated the width of the chamber; reacting on matter with radiation generated in a plasma. FIG. 10 is a side view in cross section of a modified Another object is to provide an apparatus and method for elongated reaction chamber employing a plurality of elec reacting on matter with radiation generated by a plurality of trode pairs to generate a plasma or plurality of plasmas in the plasmas. chamber;

Another object is to provide an apparatus and method for 65 FIG. 11 is an end view in crossection of a modified reacting on matter with radiation generated by a plurality of elongated reaction chamber having adjacent electrodes for different radiation generating means. generating respective plasmas therebetween.

Page 8

DESCRIPTION OF THE PREFERRED mechanism 48 at the door hinge to permit work to be EMBODIMENTS inserted into and removed from chamber 12.

Referring now to the drawings, FIG. 1 illustrates an notWhile the described electronbeam generating means does electron beam apparatus 10 which may be operated to electron beam require ordinarily vacuum to generate and direct the perform a plurality of different functions including the illustrated in FIG. 1 and istheoperatively against work, a vacuum pump 50 is connected to chamber selective deposition of one or more materials onto a sub 12 in the event that certain types of operations require that strate and/or the selective erosion or machining of said the work, during bombardment by the beam, be provided in substrate. The apparatus 10 is composed of a chamber 12 a WaC containing work to be processed by an electron beam B O Amaster controller 11, such as an adjustable multi-circuit, which is generated within and directed through a chamber self-recycling timer or other form of program controller or 14 disposed on top of the chamber 12 communicating with computer, is provided having a plurality of outputs 11' on said chamber 12 by means of a small opening 26 in the upper which are generated respective command control signals for wall of chamber 12. Disposed at the upper end of chamber controlling all of the described motors and other servos as 14 in a housing 15 is an electron beam generating assembly 15 well as those which will be described hereafter, so that the 18 which includes a filament 19 surrounding a rod-like apparatus 10 may be operated in a preprogramed manner cathode 20. The rod-shaped emitter 20 is indirectly heated which includes the replacement of work previously pro by the filament 19 and generates an electron beam when a cessed with new work suitably aligned on the fixture or table suitable source of high voltage 55 is connected to the emitter 41, the predetermined location and subsequent movement of 19. Surrounding the described elements is a heat shield 21 said table to bring different areas thereof in alignment with and disposed directly beneath and adjacent the heat shield is 20 the beam, the programmed operation of the beam and, as a grid 22. Suitable filament supply, bombardment supply and will be described hereafter, the programmed admission of grid supply means denoted 52, 53 and 54 are provided and one or more materials to the electron beam to permit their connected to the respective elements of the emission assem selective deposition onto selected areas of the surface of bly 18 for generating a suitable electron beam which is 25 workpiece 40 for the construction of electrical circuits, the directed through a small opening in an anode plate 29, selective contouring of plates, or the selective coating of thence into an elongated passageway 14' which is shown articles.

surrounded by electro-magnetic coils denoted 23, 24 and 25, Materials to be deposited onto the surface of the substrate the purpose of which will be described. Plates 29, 29' and 40 may be admitted to the immediate vicinity of chamber 12 29" contain collimating slits for the beam B. 30 or at a plurality of points along the path of travel of the At the end of passageway 14, the beam passes a pair of electron beam. Said material may be in the form of a solid focusing pole pieces 28 and 28' which serve to focus the rod or wire which is directed into the electron beam and beam through an opening 26 in the upper wall of chamber melted or vaporized thereby and carried along or within said 12 against a selected area of a workpiece 40 disposed in beam to the area of the surface of the substrate intersected alignment with said opening. 35 by said beam so as to be deposited thereon or diffused into The hereinabove described electron beam apparatus may the outer stratum of said substrate. The manner in which the be modified or supplemented with features found in known material is deposited or diffused will be a function of the electron gun apparatus such as provided, for example, in intensity of the beam which may be a constant potential or U.S. Pat. Nos. 2,944,172 and 3,009,050 and in the the “The variable in accordance with command control signals gen Focusing of Charged Particles” edited by Albert Septier. erated by the master controller 11. Accordingly, notation 55 The work piece 40 is shown as a flat substrate such as a refers to a source of high potential energy connected to the sheet or plate of metal or insulating material such as ceramic rod cathode. In certain instances, it may be desirable to or plastic and may comprise an electronic circuit board or provide an electronic or motor operated means within the other device on which it is desired to perform operations of unit 55 for varying the potential output thereof in accordance selectively adding material thereto and/or eroding or remov 45 with a variable command control signal generated on the ing material therefrom. The substrate 40 is shown secured to input thereto by the master controller 11. Suitable means for a fixture or table 41 which is operative to move at least in varying the voltages applied to the filament and grid located two directions by predeterminately controlling respective in blocks 52 and 54 may also be provided which are varied motors 44 and 46 so as to locate any particular area of the in accordance with signals generated by the master control substrate 40 in direct alignment witch the opening 26 and the 50 ler 11. Accordingly, by such means, the potential and char beam passed therethrough to permit preprogrammed opera acteristics of the beam as it passes through the opening in tions of said beam on said substrate. Asolenoid or motor 45, anode 29 in the chamber 14, may be predeterminately varied when controllably, operated, actuates a clamp 42 which in accordance with the operation to be performed thereby. operates to secure the work piece 40 on the fixture 41 or Notations 39, 39' and 39" refer to respective conduits in release same so that it may be removed from said fixture. 55 the form of Small diameter tubes extending into the cham The support 41 is movably mounted respect to a base 43 and bers 15, 16 and 17 which respectively surround the beam is prefereably positionally controlled by respective lead emitter, the elongated passageway 14' and the focusing pole screws driven by the motors 44 and 46 in accordance with pieces 28 and 28. Respective solenoid operated valves or the manner of conventionally positioning a work table with pumps controlled by signals generated by master controller respect to a machine tool. Notation 47 refers to one or more 11 may be utilized to admit predetermined quantities of motors and controls therefore for operating an automatic Selected gases, vapors, liquids and/or powdered materials manipulator 47" located either within or exterior of the through the conduits 39, and 39" to be ejected from the open chamber 12 and operative to remove individual units of ends thereof into the electron beam and to be carried along work from the table 41 and to replace same with new work the beam through the opening 26 against the surface of the to be processed in synchcronization with the operation of the 65 workpiece 40 intersected by the beam B. motor 45 operating the clamp 42. A door 12 is opened and The potential and movement of electrons or particles closed by means of a motor 49 operating a suitable cam within the beam B may be sufficient to carry particles or

Page 9

droplets of material admitted to the beam along the beam to the provision of an endless conveyor for continuously or the surface of the workpiece. However, auxiliary means are intermittently feeding work to be processed by the beam past also provided in FIG. 1 to confine the material admitted to the opening 26. The apparatus 10 may also be modified to the beam to the vicinity of the beam and, in certain instances, permit movement of the beam housing 14 in one or more to induce its movement along the beam toward the work. directions with respect to a large workpiece and to control Such means includes a plurality of electro-magnetic coils the location thereof with respect to selected workpieces for 23, 24 and 25 disposed along the passageway 14 which coils performing beam erosion and/or deposition operations as are energized in a manner to magnetically confine the described. Operation of the means for energizing the elec particles to the vicinity of the beam and, in certain instances, tromagnetic coils 23, 24, and 25 for generating suitable to induce movement of the particles along the beam towards 10 magnetic fields An the vicinity of the beam to control its the work. The coil 25 may also serve to assistin focusing the direction, focusing and to confine or control the flow of beam through the focusing pole pieces 28, 28 so as to be focused at a fine point when it intersects a surface of the the control of the masterto,controller material admitted there as described, may also be under,

work.

Shown disposed within the intermediate chamber is a coil Further modifications to the apparatus of FIG. 1 include 30 containing a wire 31 of material to be deposited, such as 15 the provision of additional electrode means for generating a metal, which wire is guided about a plurality of rollers 32 plurality of beams and directing same against one or a and a pair of rollers 33 through a passageway between the plurality of different areas of a workpiece to simultaneously coils 24 and 25 into chamber 14'. The rollers 33 are power perform operations of the type described. For example, one operated by a motor (not shown) which is controlled by a beam may be operated to erode a selected area of a work motor controller 34 operated by a signal generated by the piece while a second beam may be operated to selectively master controller 11. Thus, by properly programming master deposit material on another area of a work piece to both controller 11 to generate a signal which is passed to con excavate and/or build up material on said workpiece or to troller 34, the rate of travel of wire 31, as well as the timing fill in areas which have been previously eroded. By simul taneously operating a plurality of beams to simultaneously of its admission to the beam B, may be predeterminately controlled so that predetermined quantities of the material of 25 deposit and/or erode material from the workpiece surface, said wire may be vaporized and directed along the beam tothe time required to fabricate devices such as electronic be deposited onto the surface of the work piece in accor circuits may be substantially reduced.

dance with the predetermined operation of the beam and By providing means in chamber 12 for disposing lead positioning of the work piece so that material may be 30 wires against selected portions of a substrate such as an predeterminerely deposited onto select areas of th work electrical circuit, one or more beans may be used to weld piece. said to the substrate by melting a metal of the wire and/or Notation 35 refers to a reservoir of particulate material depositing a weld material against the wire and substrate by located within the intermediate chamber 16 which is fed by means as described.

means of a conveyor or motorized pump 36 through a tube 35 Thin or thick metal films may be deposited onto a 38 extending therefrom. A controller 37 receiving command substrate by admitting metal to the beam by one or more of control signals from the master controller 11 is connected to the means described, as the substrate and/or beam means are the motor operating the pump or conveyor 36 so that moved or deflection controlled so as to form electrical predetermined quantities of said particulate material may be circuit lines or leads on the substrate. Semi-conducting, fed or directed on a gas stream into chamber 14 and the polyconducting or insulating materials may be selectively beam generated therein. deposited on a substrate to form various electrical circuit A second coil 56 of metal or other suitable material components providing, for example, integrated circuits and provided as a wire 58 is located within chamber 12 and is the like.

rotationally mounted off the upper wall thereof and driven In FIG. 2 is shown a modified form of electron emitter and by amotor 57 controlled by a signal generated by the master 45 beam forming apparatus applicable to the apparatus of FIG. controller 11. The wire 58 is fed between powered rolls of 1 The beam emitter assembly 60 is composed of opposed a guide 59 which is driven by a motor (not shown) which is electrode portions 61a and 62b terminating at the end of the also controlled by a signal or signals generated by the master electrode and opening 63 therebetweenthrough which mate controller 11. The operation of the motor operating the rial to be vaporized and carried by the beam may be fed. The vacuum pump 50 may also be controlled by the master 50 electrodes may be made of suitable high temperature con controller 11 so as to predetermine a complete cycle of ducting material such as tungsten or other high temperature operation utilizing said vacuum pump. metal and are supported by insulating gasket plates 65 and It is noted that wire, particulate material, liquid orgaseous 6S.

streams of matter may also be directed into the electron A first material 66 in the form of a rod or tube extends beam B at any of the locations where tubes 39, 39' and 39" 55 through the center of the electrodes 61a and 6lb and is enter the chambers 15 and 16. downwardly fed by means of u pair of powered rollers 64 The wires 31 and 58 may comprise various polymers, operated by motor (not shown) which is preferably prede semi-conductors or ceramics, metals or alloys. Where said terminately controlled to control the feed, speed and timing wires or rods are made of conducting material such as metal, of the drive of consumable member 66 in accordance with they are preferably electrically insulated from the housing the operation of the computer or master controller as and are not grounded in a manner which would ordinarily described. A guide 67 in the form of a plug of insulating cause the beam B to discharge to ground. Similarly, all tubes material having an opening 68 therein receives rod 66 and 39, 39', 39", 38, etc. feeding fluent material to the beam are guides it to the end of the conical head of the electrodes 61a also prefereably either made of electrical insulating material and 61b. Suitable means, as described above, may be or are insulated from ground. 65 provided to heat the electrodes and the end of rod 66 a It is noted that the apparatus of FIG.1 may be subject to sufficient degree to cause said rod end to melt or vaporize a number of design variations and may include, for example, within the beam generated by the electrodes. If the potential

Page 10

generator across the electrodes is of a sufficient intensity, the more materials to the interiors of said hollow beams to be material melted or vaporized from the end of rod 66 will be carried therewith and deposited on a substrate intersected by carried along the beam towards the work as described. the beams or to cooperate with the beams in operating on the The consumable electrode 66 may also comprise a hollow substrate. Features of the apparatus illustrated in FIGS. 5 to tube containing gaseous, liquid, vaporous or powdered 7 may be applied to the apparatus of FIG. 1 or other suitable material fed to the open end thereof to be dispensed into the apparatus as described herein for performing various opera zone in which the beam is generated. tions on solids, liquids, gases or matter in the plasma state. Also illustrated in FIG. 2 is a rod 69 fed between powered By “hollow or tubular electron beams" is meant electron rollers 70 and 71 to beneath the end of the conical electrodes beams which have the configuration of an elongated tube 61a and 61b so as to be admitted to the vicinity thereof in 10 having a hollow interior or core which is not occupied by the radiation beam.

which the intense beam is generated for melting or vapor In FIG. 5, an electron beam generating apparatus 90 izing the material of said rod. includes a first housing 91 in which is disposed an anode 92 A tube 72 is also shown in FIG. 2 which is connected. to attached to a mount 92. A cathode head 93 is centrally a source of fluent material such as described and having its 15 disposed within open end 72 disposed immediately beneath the electrodes 93 andfaces an the anode mount by means of its own mount opening 91" in the housing 91 which extends 61a and 61b so as to admit fluent material to the beam so generated for the purposes described. through an opening in a second housing 94 which may extend to or be the equivalent of housing 16 of FIG. 1. The

While a source of electrical energy PS is shown in FIG. cathode head 93 when properly energized by a suitable 1 as being operatively connected for operation of the master 20 source of high voltage electrical energy, is operative to program controller or computer 11 which power supply may generate a hollow electron beam B which converges as it generate the electrical energy necessary to activate the passes through the opening 91' and is directed by suitable controls or operate the various motors and servos of the control and focusing means (not shown) out of an opening apparatus 10, it is assumed that suitable power supplies are in housing 94 to the surface of a work piece such as a provided to operate all the described components such as the 25 substrate or into a spacial volume beyond housing 94 magnetic coils, the high voltage power supply 55, the containing gaseous or liquid matter to be reacted on by the filament supply 52, the bombardment and grid supplies 53 beam. The cathode 93 contains an opening 93H and 54 as well as the described material feed means and therethrough, through which opening matter may be directed work positioning servos. to the interior of the hollow beam B. Said matter may be in There is shown in FIG. 3 a structure in a work member 30 the form of a solid rod or wire, particulate material carried which has been subjected to beam deposition operation of on an airstream or other fluid carrier directed through the the type described. The workmember 80 is composed of a interior volume 93" of the housing 93' and/or a gas or vapor base 82 having an upper stratum 84 composed of material flowed under pressure into the volume 93" and directed at deposited thereon such as semi-conducting material, metal suitable velocity through the opening 93H to the interior of or insulating material. Notation 86 refers to a domain of 35 the hollow beam B. In FIG. 5, notation 95 refers to a rod material other than that forming stratum 84 which has been which is driven by wheel drive means as described which is beam deposited in an opening or cavity provided in 84 by the operated by a controlled motor, preferably under the control electron or intense laser beam or beams described. The of a master controller of the type shown FIG. 1. The rod 95 material of which domain 86 is composed may comprise any may be driven completely along the center of the hollow suitable metal, semi-conducting materials or insulating beam B to the surface of the workpiece at which surface it material having characteristics which are different than those may be melted by heat transferred directly thereto by the of the material defining layer 84 and may be utilizeld, for beam B and/or the workpiece itself intersected by the beam example, to form part of an active element of a semi for coating, diffusing or otherwise depositing same onto the conductor device, an insulating or isolating element or workpiece. The rod 95 may also be vaporized by the intense adjacent to or surrounding an active element or a conducting 45 heat of the beam B as said rod enters the narrowest portion element disposed in cooperative relationship to other mate of the beam and the resulting vaporized metal or other rials; (not shown) similarly deposited on or within the material defining the rod may be carried along the interior of stratum 84. the beam by flow induced by the beam itself, by gas directed In FIG. 4, a domain 88 ff material is shown completely along the center of the rod or adjacent thereto as it passes Surrounded by a stratum 87 of material which has been 50 through the opening 93H in the cathode or by moving deposited simultaneously and/or after the deposition of the electro-magnetic fields generated by electro-magnets dis material comprising domain 88. posed around the housing 94 as described. Circuit conducting strip elements may also be similarly The apparatus of FIG.5 may also be operated wherein gas deposited along selected areas of a substrate or material under pressure is forced through the opening 93H which deposited on a substrate to form various electrical devices 55 may be in the shape of a nozzle operative to direct said gas and circuits. The substrate may comprise, in addition to as a high-velocity stream along the center of the beam to the various flat ceramic, glass or plastic materials, chips of surface of the workpiece. The gas, may be utilized perse in silicon and other materials, crystals, filaments, wires, rods, cooperation with the beam to effect such operations as foil other electrical components and devices such as semi cutting or severing portions of the workpiece intersected by conductors, integrated circuit assemblies and components, the beam and gas, creating a chemical reaction in which the polyconducting layers, metal films, etc. In addition to depos gas effects a change in state of the work piece, boring or iting conducting and semi-conducting components as circuit drilling a hole of predetermined shape and dimension elements, the means described herein may be used to deposit through the workpiece, moving material melted by the beam doping materials and isolating oxide materials, polyconduct or rapidly oxidizing and vaporizing or volatizing material of ing materials, etc. on circuit members. 65 the work piece for the purpose of removing or machining FIGS. 5 to 7 illustrate features of apparatus for forming same. The gas may also Contain fine particles of solid or hollow or tubular electron beams and for feeding one or vaporized matter which is deposited on the workpiece for

Page 11

any of the purposes described or may be used to erode or may be easily vaporized as it enters the hollow beam B' and cause flow of the work ea described or may be injected into the vapors thereof may be carried by the beam in the a gaseous or liquid material for creating a chemical reaction, direction of the work.

effecting combustion to weld or rapidly heat the volume into In order to properly vaporize a solid rod or particles which the beamis injected, create a plasma such as a plasma introduced into the interior volume 98" of the beam B, jet or generate thrust. focusing magnetic coils may be applied downstream of the In FIG. 6, a modified form of the cathode of FIG. S is snout end of the cathode 99 to cause a pinch effect in the shown having a plurality of through and through openings beam B' so as to converge the beam particles against the therein through which openings may be injected, flowed or solid material directed into the interior of the beam for the forced the same or different liquid, gaseous or solid mate O purpose of vaporizing said material.

rials. Amount 93 a for a concave cathode 96 is disposed as In a modified form of the apparatus hereinabove part of an electronbeam apparatus of the type shown in FIG. described, a solid rod of ion-forming material such as 5 and is hollow, defining a passageway 93" through which cesium may be directed through the annular passageway in a liquid, gas or plasma may be flowed out the openings the cathodes described or otherwise disposed along the

93H1,93H2 and 93H3. The latter two openings are shown cathode and the paramus may be operated in such a manner disposed radially outwardly of the axial opening 93H1. A as to generate ions thereof for the purpose of effecting thrust, plurality of additional openings may also be arrayed about to effect propulsion of the apparatus such as rocket propul the center opening 93H1. SO

In one form of the apparatus shown in FIG. 6, a solid rod 20 In the operation of the aparatus described, it is noted that or wire may be driven through the opening 93H1 while a gas the same beam employed to vaporize and effect deposition or liquid may be admitted to the center of the beam B of material on a substrate may also be employed to erode through the openings 93H2 and 93H3 after being forced selected portions of the substrate prior to or after materialis through the passageway 93" behind the cathode. Solid deposited thereon. These distinct operations may be effected material directed through the openings in the cathode may by program and/or adaptively controlling beam intensity, be vaporized as soon as or shortly after they enter the interior 25 beam focus, relative movement of the beam and/or work of the beam B by the high-intensity electrical energy applied piece and the time the beam remains on the area being to the cathode 96.a. eroded so as to predetermine the depth of the cavity. Thus In FIG. 7, an injection gun design is illustrated for predeterminately contoured substrates may be formed by initiating a hollow beam in a uniform magnetic field. The 30 program controlling the above variables to erode and/or apparatus 97 includes an elongated cylindrical magnetic coil deposit material across the surface of the substrate. Electri 98 surrounding a chamber 98 in which is supported, on a cal circuits composed of crystals or other devices having tubular mount 100, a cathode 99. Apassageway 100'extends domains of different materials located at different depths through the tubular mount 100 and may be utilized for therein may be so fabricated as well as prototype models or directing a solid, liquid, gaseous and/or plasma material to 35 mold cavities having irregular shape. a passageway 99; extending through the cathode 99. The Modified forms of the invention illustrated in FIGS. 1, 2, cathode 99 has a conical cathode emitting surface 99a which 5, 6 and 7 include the following embodiments: is surrounded by a conical shaped anode 102. The beam B' (a) a plurality of different materials may be controllably emerges from the cathode emitting surface 99a and is fed simultaneously or sequentially into the intense directed by means of a uniform axial magnetic field gener radiation beam by predeterminately controlling the ated by the magnetic coil 98 so as to form a tubular beam operation of respective motors or valves operative to which is passed through a drift tube 101 in the direction of admit said materials to the chamber and beam in a the Work. A gas, vapor, plasma or gas containing particles, program controlled cycle determined by the operation is forced through the passageway 100' and through the axial of the master controller or computer 11 in open and/or bore 99; extending through the cathode 99. It is ejected as a 45 closed loop cycles with or without the application of stream S through the center volume 98" of the beam B' and adaptive control thereto. Such plurality of materials may be flowed as the result of its velocity and/or the force may all be in the same or different states (i.e.-solid induced thereby by the magnetic field or the portion of a wire formations, flowed particles, liquid streams, gas or beam particles so as to be directed through the gun against vapor stress or streams of charged particles such as the work volume or surface intersected by the beam B'. 50 plasma streams).

It is noted that auxiliary fluid, such as gas, vapor, plasma (b) The movement of electrons defining the beam may be particles or solid particles may be flowed between the head utilized to induce the flow of the material in the beam end of the anode 102 and the head of the cathode 99through to flow along the beam. In this connection, the particles the annular opening 104 or through one or more openings of deposition material flowed to the beam or formed 103 disposed between the anode 102 and the drift tube 101 55 therein may be charged as they enter the beam or so as to be carried between the outer surface of the beam B' precharged prior to admission to the beam so that the and the drift tube in the direction of the work to be expelled combination of forces resulting from formation of the from the end of the gun towards said work with the beam B'. beam and its directional control means may be utilized While the beam B'shown in FIG. 7 is illustrated as having to carry the deposition material particles along the arelatively thin wall, the volume 98" defining the interior of 60 beam towards the work. Auxiliary magnetic field coil the beam which does not contain beam particles may be of means may be disposed along the beam to account for relatively small diameter and in one instance, may be and direct deposition material around or within the substantially equal to or smaller than the diameter of the . beam towards the work. Said coils may be operative to bore 99 through the cathode 99 so that the gas, liquid or generate static magnetic fields or moving magnetic plasma injected through the cathode may be in contact with 65 fields which move in the direction of the beam to the beam 50 as to be carried thereby towards the work or so induce flow of the material admitted to the beam along that a solid or wire fed through the openings 100' and 99' the beam in the direction of the work.

Page 12

c) An auxiliary gas stream such as a stream of inert gas or any of the compartments of the chamber 11. The laser active gas, may be directed from a conduit along the may also be disposed exterior of the elctron gun electron beam to induce flow of particles of material housing with its beam directed through an opening or admitted to the beam to cause said particles to intersect window thereto such as through the passageways 39, the area of the work intersected by the beam or the area 39' or 39". The laser may also be supported on the immediately adjacent thereto. Said gas may be intro shield 21, the mount for grid 22 or the insulation duced at one or more locations along the path of travel material supporting the cathode and may have its beam of the beam and controlled in accordance with the directed to intersect the cathode wire or rod 20 to quantity and characteristics of the material admitted to supplement or replace the heating filament 19. the beam. 10 (i.) The intense radiation beam of a laser disposed within (d) The flow of the hereinabove described materials along or directed through through the chambers 11 and/or 12 the beam may be effected by generating a plasma at from the exterior thereof may be utilized to cooperate least in part by the operation of the beam and/or with the electron beam generated as described, in auxiliary electrode means surrounding the electrode operating on Work, Such as in performing such opera which operates to generate the beam by admitting 15 tions as selectively heating, melting , vaporizing or suitable material to the vicinity of said electrodes. Said otherwise affecting work or performing a plurality of plasma may be flowed as a stream surrounding the such operations. In this connection, a single laser may beam by suitable magnetic field generating means such be employed to perform a plurality of operations in as one or more electro-magnets disposed adjacent to the cooperation with the electron gun, such as heating the beam along its path of travel. Such plasma, if generated 20 cathode thereof and heating and vaporizing material to at relatively high temperature, may also be operative to be deposited or implanted by the electron beam or a cooperate with the beam in heating the surface of the laser beam as described, heating the cathode and the work. work, generating a plasma and heating the work, vapor (e) The illustrated and above described embodiments may 25 izing material of the work during or before material is all utilize one or more electron beams or one or more deposited by the electron beam or laser beam or in the laser light beams generated at sufficient intensity to performance of the other operations described. Gaseous, vaporous and/or particulate matter may also effect the desired described results. For example, solid be controllably flowed through the plasma or plasmas wire or rod, particulate, vaporous, liquid or gaseous so generated to perform select chemical and/or physical material may be introduced into the intense light beam reactions thereon prior to deposition or separation of generated by the laser disposed in the vicinity of the 30 the reaction products thereof. A single laser and/or electrodes illustrated and may be vaporized thereby and electron beam may be split into a plurality of beams by carried along the laser beam towards the work by one suitable beam splitting means such as lenses, mirrors, or more of the means described. Particle charging or or magnetic means. Such plural beams may be used to ionizing means may be provided in the vicinity of the 35 perform the same function such as heating, melting, laser or along the beam to form a plasma-like flow of cavitating, vaporizing, implanting, etc. on different material along the beam towards the work. portions of the work or different functions on the same (f) A plurality of electron and/or laser beams may also be or different portions of the work and to generate a generated within the chamber and each predetermi plurality of plasmas at different select locations. nately, directed to intersect a selected area or the same 40 j) The described apparatus or variations thereof may area of the surface of the work. One or more materials perform controlled operations on or with respect to to be deposited onto the work may be introduced into liquids, gases, vapors or plasmas into which beams and each beam. One of the beams may be operative to erode material(s) are directed within a chamber or within free preselected portions of the work substrate while one or space, to perform controlled chemical reactions, plasm more other beams may be operative to deposit selected 45 generation, propulsion, burning and welding. Material amounts of material onto the substrate. or materials flowed or injected into, within or parallel (g) The described bean or beams may be operated at to the laser or electron beam may be oxygen, an inert sufficient intensity to not only vaporize or otherwise gas, a material to be added for alloying, doping or change the state of material admitted to the beam but adding to the material being heated or otherwise oper also to cause the diffusion of said material into the 50 ated on by the beam.

substrate intersected by the beam after or properly (k) Material directed into the beam in the vicinity of the heating that portion of the substrate receiving the fused work may comprise a combustible or explosive mate material. In other words, the velocity of the beam rial operative to burn above the work or generate a particles may be operative to cause deposition particles controlled explosion for affecting the work such as carried thereby to be diffused into the surface stratum 55 generating a chemical reaction therewith, eroding or of the work intersected by the beam and deposition pulverizing part or all of the work, generating a larger material. explosion in the vicinity of or utilizing the work, (h) Since the cathode current density increases exponen generating a controlled nuclear reaction, etc. tially with temperature and since relatively high tem Modifications and improvements to the apparatus and peratures may be required to vaporize certain material 60 methods described are noted as follows: to be deposited, to generate plasmas or to more rapidly In addition to the use of electron beam and laser radiation machine the work by generating beams of relatively to attain certain of the results described above and here-after, high voltage (above 20 kV), the intense radiant energy other means for generating and utilizing high intensity beam of a laser may be employed to heat the cathode radiation may also be employed. For example, high voltage and/or the material being fed to the electronbeam or the 65 and/or high amperage electrical energy may be controllably surface of the workintersected by said beam. Said laser applied to one or more electrodes of one or more electrode may be conveniently located within the chamber 12 or pairs disposed as described, or otherwise proximate to each

Page 13

other and so energized as to generate a continuous and/or of a suitable metal, metal alloy, ceramic such as a ceremet intermittent plasma in the space or volumes between elec or high temperature glass or a combination of such materials trode pairs upon the discharge of electrical energy therebe preferably with one covering or coating the other, such as a tween. Solid, particulate, liquid of gaseous reaction material, metal tube interiorally coated with a high temperature or a plurality of different reaction materials in the same or 5 ceramic insulatedly supported by opposite wall portions of different states, may be motor driven or flowed as a stream the duct 101 are respective electrodes 102 and 103 of an or streams between such electrodes or one or more tandem electrode pair which protrude into the interior volume 105 of arrays of stream following electrode pairs to be intensely the duct and terminate apart to define a gap or space 104 heated by the arc or plasma radiation in a manner to effect therebetween. Molecules of gas, vapor or solid or liquid a change in physical state of the reaction material such as by particulate material or combinations thereof to be reacted on, vaporizing or melting same,or by chemically changing same O are pumped, fed by gravity or otherwise flowed through duct by electropyrolosis and/or electrochemical reaction wherein 101 se or on a stream of neutral gas molecules such as two or more elements or compounds are caused to chemi nitrogen, past and between the electrodes while suitable cally react in the high temperature plasma or the bonds electrical energy is applied across the electrodes to generate between the atoms of one or more compounds are broken. 15 a high temperature arc or plasma therebetween. A single Such processes, include controllably separating the reaction electrode pair or a plurality of electrode, pairs aligned with products either during the processing of reaction material by each other, may also be staggered along the duct and one or more of the high temperature plasmas, so generated energized to generate respective arcs for progressively and/ as matter is flowed therethrough or immediately after pass or completely heating all or select fluid particles or mol ing from such single or multiple plasmas. Such separation ecules passed through the duct to temperatures sufficient to may be effected by known separation means such as by 20 effect the described chemical and/or physical reactions. gravity, centrifuging, vortex flow, filtering, radiation beam While the electrodes 102 and 103 of FIG. 8 are operable to or a combination of such means. In continuous processing, generate an arc near the center of the duct, other electrode one or more of the products of a plasma reaction may be pairs downstream and/or upstream thereof may be space flowed or conveyed to the next stage of processing to partake separated one or more distances closer to the wall of the duct in one or more further chemical physical reactions down 25 on either or both sides of the axis of the aligned electrodes stream of the plasma generating apparatus. illustrated, either close to the electrodes illustrated and/or for In a particular form of the invention, a gas, liquid, or some distance downstream or upstream thereof. If the duct particles of a solid or two or more solids perse or disposed is made of an electrically conducting material such as metal, in a liquid stream may be flowed by gravity or pumped the electrodes are preferably insulatedly supported thereon through a duct containing a plurality of electrode pairs 30 as shown by suitable insulating collars or deposited material. disposed at select spaced intervals along such duct, across Depending on the voltage and the gaseous matter in the duct, each of which electrode pairs is generated one or more the plasma arc may be generated in the gap 104 and/or in a plasmas, Such as a continuous or intermittent arc or series of volume extending laterially therefrom. intermittent and/or continuous arcs, through which plasma Longitudinally extending guides or vanes secured to or such reaction fluid is passed to effect heating of the mol 35 forming part of the wall 101 may be so shaped and disposed ecules thereof to either breakthe bonds between one or more as to guide and cause working fluid passing longitudinally of the compounds of the fluid or its particles or to effect a through the duct through the one or more plasmas generated select chemical reaction or reactions with respect to ele therein as described.

ments and/or compounds of the fluid passing through the Variations in the construction and operation of the appa duct. The duct, or elongated reaction chamber may be made 40 ratus 100 of FIG. 8 are noted as follows: of or lined with a suitable high temperature or chemical A. Electrode pairs of the type shown and/or modifications corrosion resistent material, such as Pyroceram or the like. thereof may be supported by adjacent or opposite In a particular form, all or a portion of such duct or reaction portions of the wall of the elongated reaction chamber chamber may be rotated about its longitudinal axis or or duct at a number of locations longitudinally along otherwise, to effect one or more results . If the duct is 45 the duct. Such electrodes may be located and posi irregularly shaped and/or contains one or more vanes tioned with respect to each other and the flow volume therein, ahelical swirling movement may be imparted to the 105 of the duct that substantially all of the gas mol working fluid or products of reaction passing through the ecules and/or soild particles passing through the duct duct to centrifuge or otherwise separate atoms or molecules pass through one or more plasmas generated within the which are products of the high temperature reaction which 50 duct and are heated to a suitable high temperature to takes place within the duct. If the electrode-pairs are located effect a desired physical and/or chemical reaction to off center within the duct, the plasmas generated thereby will effect reactions of the types described herein involving, be rotated through the working fluid is it passes longitudi for example, the pyrolizing and reduction of waste nally through the duct to optimize the reaction results if the gases and particles therein, to reducing of ores to flow of such working fluid is controlled to effect such 55 remove a metal or metals therefrom, the removal or optimized reaction. In a particular form, such plasmas may elements, such as carbon, from gases and soild particu be generated by locating the electrodes of the electrode pairs late materials and the formation of synthetic diamond at or near opposite walls of the duct to permit the plasma or other materials therefrom, the separation of hydro generating arcs to span the width of the duct, thus permitting gen from oxygen in water vapor, the reduction of the plasmas to react on all fluid passing therebetween and carbon monoxide from combustion gas to form carbon filling the interior volume of the duct. The line or plane dioxide and/or elemental carbon and oxygen thereof, between pairs of such electrodes may be radially angulated breaking the bonds between carbon and oxygen atoms with respect to the other pairs of electrodes so as to react on of carbon dioxide to form carbon and oxygen thereof all or more of the fluid material passing though the elongated per se or in the present of a gaseous or particulate reaction chamber or duct. 65 catalyst.

In FIG. 8 is shown a radiation reaction apparatus 100 B. The apparatus 100 may comprise, form part of or be defined by an elongated cylindrical tube or duct 101 formed disposed longitudinnay within a smokestack con

Page 14

nected to a furnace or an exhaust pipe for an internal the molecules thereof,they may be continuously combined combustion engine. with other atoms or molecules of additional matter continu C. Microwave, laser or otherform of beamed energy may ously fed to the reaction chamber, Zone or zones or may be be generated outside the reaction chamber 101 and absorbed by solid particles of matter so delivered. For directed through one or more openings in the side wall suitably dissipating waste particles and gas molecules of thereof to scan and heat the fluid contents of the combustion, particles of one or more low cost materials such chamber perse or in combination with the heat gener as calcium carbonate, calcium chloride, or other material ated by the electrically discharged electrode pair or may be fed to the reaction chamber or Zone separate from or pairs of electrodes disposed within the volume 105 at 10 mixed with the waste gas and particles to react on or absorb one or more locations therein as described. the components of reaction resulting from the described high D. Replacement of worn electrodes may be effected by an temperature may be heating. Such additional particulate material employed to absorb and/or react with the products of automatic handling means, such as an automatic the high temperature reaction to reduce same disposable manipulator service one or more reaction chambers. solid waste or provide one or more new and useful products Alternatively, either or both electrodes may be power 15 thereof.

driven at a fixed rate or in accordance with signals Liquids or liquids containing solid particulate material generated by a sensing means sensing electrode wear or the distance between electrodes, by a motor or motors and/or solid chemicals dissolved therein may be flowed controlled by a microprocessor or computer. Each through reaction apparatus of the types illustrated in FIGS. electrode or a bank or banks of longitudinally aligned 20 8 to 11 whereby arc generated between the electrode pairs or staggered electrodes may be secured to a common thereof heat and effect reactions of the types described with bus which is driven by a motor supported by the wall respectmatter to the molecules of the liquid and/or particles of solid thereon. In addition to various chemical reactions, 101 of the duct, in a manner to maintain a constant or predetermined gap between all electrode pairs. hydrogen atoms may be so separated from oxygen atoms of E. A single plasma may be generated between a plurality 25 water mixture generating bubbles of hydrogen and oxygen gas in the water passed through the reaction chamber or of electrode pairs longitudinally aligned or staggered duct which longitudinally along the duct or separate and discrete means, Suchbubbles mixtures may be collect-downstream by know may be stored or burned or otherwise plasmas may be so generated which are of the same used in further reactions intensity or predetermined intensities depending on the oxygen components thereoforseparatedmay have the hydrogen and from each other for manner in which heating or pyrolizing material in the 30 various separate uses. In a particular form, duct is effected. For example, a plurality of plasmas tially all of the liquid passed into one end of theallreaction or substan duct may be generated along the duct operable to gradually may be reduced to its atomic components or otherwise or step increase the temperature of particles or gas molecules flowing through the duct from plasma to caused to undergo a complete chemical reaction. plasma. Plasmas may be generated completely across 35 includes an 9elongated

In FIG. a high temperature reaction apparatus 106 duct or tube 107 of the type described the diameter of the volume 105 and/or longitudinally having one or more pairs therein by means such as illustrated in FIGS. 9, 10 and ported by opposite portionsofofelectrodes 108 and 109 sup the wall or walls of the duct.

11 or modifications thereof. The inner ends 108A and 109A of the electrodes 108 and 109 F. The radially extending electrodes 102 and 102 may be terminate at or near the inside surface of the tube-or duct 107 supplemented or replaced with electodes or electrode 40 which may be constructed as described. Thus the arc A is assemblies which extend longitudinally though and generated as shown and extends substantially completely within the duct 101. Electrodes may also be formed of across the center of the interior volume 110 of the duct 107. electrically conducting material or materials such as The construction of the duct and electrode mounting may be carbon, metal, metal alloys, superconducting material in accordance with the teachings of FIG. 8. A plurality of or combinations thereof which partially coat or line the 45 pair of such electrodes may be supported aligned along the inside surface of the duct 101. The duct may also be duct, staggered or helically disposed therealong to heat and fabricated of a plurality of longitudinally extending effect reactions with respect to a select amount or substan wall sections of conducting electrode material which tially all the particles or molecules of fluid material passed are insulated from each other by respective wall section through the duct. The arcs may be generated as a single made of insulating material such as high temperature 50 plasma or plurality of separated plasmas continuously and/or ceramic or glass material. Thus adjacent or opposite intermittently. In the latter mode of operation, all arcs may sections of the duct wall made of conducting material be generated simultaneously or in a select or predetermined such as graphite or carbon metal, metal alloy or super sequence along the duct to optimize the reaction or reactions conducting material or a combination thereof may be taking place within the duct. Feedback signals generated by oppositely charged to provide plasma arcing therebe 55 one or more sensors sensing such reaction variables as tween for the purposes described. current voltages, amperages, plasma temperatures and G. A single computer supported exterior of the duct 101, shape, reaction products,etc may be employed in a closed may be employed to control all process variables loop process control system to control such variables as flow including the feeding and flow of one or more reaction rate, composition, voltage and amperage. Products of reac fluids to one end of the duct, current applied continu tion such as atoms and molecules of gas, vapor and/or solid ously or intermittently to the electrodes to generate material(s) may be collected downstream of the reaction continuous or intermittent plasmas therebetween, elec zone or zones and separated or used as described. trode replenishment, etc. While FIG. 10 may represent a side view of the apparatus Further modifications to the apparatus and methods of FIG. 9 when multiple pairs of electrodes are employed, if described are noted as follows: 65 adjacent electrodes on the same side of the wall are of Where atoms of products of the described high tempera opposite polarity, plasma arcs may be generated therebe ture heating of gas or particulate matter are separated from tween as shown rather than across the center of the duct as

Page 15

in FIG. 9. A combination of arcs generated close to the wall, wire, rod or tubing. If atomized as described immediately as in FIG. 10 and across the duct as in FIG.9 may also be after separation from the compound or ore, the metal may be employed in yet another embodiment of the invention. sprayed against a shaping surface such as the surface of a In FIG. 11 is shown a modified form of the invention mold, rolls of a rolling mill, elongated driven member such illustrated in FIGS. 8 to 10 the features of which may be as a continuously formed or coilfed sheet, strip, rod, tube or combined with features of the other figures or employed per other shape and solidified as a layer or coating thereon as the se. The reactor 120, as in the construction of the other substrate is driven past the atomizing means. reactors, may comprise an elongated cylindrical duct or In modified forms of the embodiments of FIGS. 8 to 11, chamber or a spherical or otherwise shaped chamber through suitable vanes or the like may be attached to the inside which reaction fluid is continuously force flowed by pump, 10 surface of the tubes or ducts illustrated to impart a helical or blower, gravity or a combination thereof. Supported by the swirling movement to the fluid passed through the ducts to side wall of the chamber 121 and protruding into the volume assure that substantially all the molecules or particles thereof interior thereof are a plurality of electrodes. Four electrodes pass through a plasma or arc or arcs generated along the 122, 123, 124 and 125 are shown defining two pairs of duct. Furthermore, the tube or duct may also be rotated to electrodes disposed near opposite sides of the chamber. 15 pass the plasma arcs generated therein through most or a Electrodes 122 and 123 which are located laterally adjacent select quantity of the reaction fluid as it is flowed longitu each other define one electrode pair across or between which dinally through the duct.

a first plasma P1 is genera generated when suitable electrical It is also noted that one or more beams of the one or more potential is applied to the positive electrode 122 and breaks described radiations (laser, electron beam, microwave, etc. down or discharges in the gap at the end thereof to the end radiation) may be passed longitudinally and/or laterally of the negative electrode 123. The other electrode pair is through the duct to react on fluid particles or molecules composed of electrodes 124 and 125 between which a therein to effect the results described, perse or in combi second plasma is generated when the positive electrode is nation with each other and/or one or more plasma arcs energized with suitable electrical energy. It is noted that generated as described. Reactions which may be effected additional pairs of electrodes of the type provided in FIG.11 25 include (a) high temperature reactions on a gas or gases, may be located laterally between those shown and/or lon vapor or vapors and/or particles of the same or different gitudinally down the duct at respective locations to provide materials passed longitudinally through the duct to form new either a unitary plasma, a plurality of plasmas between two compositions; (b) high temperature or plasma reaction on or more adjacent electrode pairs or a plurality of discrete gas or vapor molecules to separate select atoms therefrom spaced apart plasmas as require to effect desired reaction 30 such as atoms of carbon from methane gas which may be results. deposited onto a moving substrate within or beyond the end Energy required to generate plasma arcs across the elec of the duct to form synthetic diamond coating on such trode pairs described may be derived from suitable sources substrate or may form particles of synthetic diamond within of hydroelectric or otherwise generated electrical energy. and/or beyond the open end of the duct; (c) high temperature Arrays of solar-to-electrical energy generating cells or 35 reaction on particles of ore in a manner to separate metal focused solar energy to electrical energy generating means and/or other atoms and the deposition thereof onto a moving may also be employed to generate the required electrical substrate located within or beyond the end of the duct or energy for energizing the electrodes after such energy is reaction chamber; (d) high temperature reaction on mol boosted or increase to a proper volatge and amperage by ecules and/or particles of waste products such as the par suitable electrical equipment. 40 ticles and gases of combustion in a furnace or reaction In a particular form of the apparatus and method chamber such as an incinerator; (e) high temperature reac described immediately above, a chemical composition or ore tion with respect to carbon monoxide and/or carbon dioxide containing one or more elements, such as metal to be formed in a combustion or incineration process to separate separated from the composition or ore, may be comminuted carbon atoms from oxygen atoms thereof and to deposit the by known means or otherwise provided in flowable paticu 45 carbon atoms per se or as diamond particles or film on a late form and flowed perse to and through one or more high moving substrate beyond the open end of the duct.; (f) high temperature plasmas generated between one or more elec temperature reactions on process or combustion products trode pairs by the application of suitable electrical energy where non-combustion matter such as particles of solid or therebetween and the high temperature of the plasma applied liquid reactants or absorbant material are introduced into the to heat the composition or ore to a temperature sufficient to 50 duct at one or more locations thereof to partake in or absorb break the bonds between atoms of metal or other element of one or more of the products of reaction. the molecules of the composition or ore whereby such metal If the ducts of FIGS. 8 to 11 are of large diameter, such or other element becomes separated from the remaining as in the configurations of Smokestacks of an industrial elements of the compound or ore. Such separated materials process or furnace, beamed radiation may be generated as may be collected in respective reservoirs or flow streams 55 described and directed in one or more fixed paths longitu thereof by gravity, centrifuging or other known separating dinally to intersect, heat and react on particles and/or mol means and separately stored for use or used in a continuous ecules of the fluid reaction material passing therethrough. process. Metal so separated may be in a molten state or One or more laser or electron beams may also be generated further heated to become molten and alloyed, atomized or and directed against a nuclear fuel, such as separately fed fed directly to a forming means such as a mold, continuous particles of trittium-deuterium passed into one or more casting die or substrate where it may be solidified to a select select locations of the duct or stack, to thermonuclearly shape or shapes. The method may define a continuous ignite same and generate, intermittent thermonuclear reac process for separating metal or metals directly from ore and tions for heating reaction material passing longitudinally shaping same in one or more stages. From a continuous through the duct or stack and incinerating or reacting on casting die or mold, for example, the metal so refined and 65 same as described herein.

formed may be continuously fed to a rolling means such as Modified forms of the invention involving apparatus and a rolling mill for reducing and shaping same to plate, sheet, methods as described above may involve the high tempera

Page 16

ture separation of carbon atoms from oxygen atoms of gas Beamed radiation, such as microwave radiation, may also molecules of combustion waste gases produced in the opera be employed per se or in combination with laser and/or tion of furnaces, internal combustion engines and chemical electron gun generated beam radiation, one or more elec reactors. Such carbon and oxygen atoms may, be separated trode pair generated plasmas or the like, to effect the and collected in separate containers of useful byproducts or chemical and/or physical reaction or reactions described. used downstream of the described high temperature reaction For example, such microwave radiation may be generated Zone or Zones in a continuing process or processes.

Where the described process is employed to separate and focused as a beam to a reaction zone defined by one or metal from its ore by breaking the bonds between atoms of more pairs,of electrode between which is discharged high metal and atoms of other elements in the ore, continuous voltage and/or high amperage electrical energy as a con known means may be operated to comminute ore or chemi 10 tinuous or intermittent discharge to generate a continuous or cals into particles of same of Small enough size to permit the intermittent plasma. Such microwave radiation may also be continuous feeding and high temperature processing of same directed and focused through a plurality of plasmas gener into desired molten or particulate metal which may be ated as described by a plurality of electrically discharged separated by known means from the other products of the 15 electrode pairs disposed close to each other or in a line along high temperature reaction.

Beam radiation generated by an electron gun or laser as theThe path of flow of working fluid or fluids. arrangements and methods described above may also described herein may also be employed per se or in com bination with one or more electrically discharged electrode be employed to selectively deposit amaterial or materials on pairs to generate or enhance one or more plasmas or plasma to a stationary or moving substrate for coating, implanting arcs for effecting high temperature chemical and/or physical 20 and/or separating same from matter such as ore particles, reactions with respect to gaseous, vaporous and/or particu chemical compositions or the like as described. Particles or late material or a combination of materials which are flu atoms which are not so deposited onto such a moving idically mixed and fed as a stream to the reaction Zone or substrate, which may comprise a wire, rod, tube, sheet or zones defined by such plasma or plasmas or are fed on strip which is continuously formed and driven, supplied separate streams thereof to such zone or zones. A single 25 from a coil or other source or otherwise conveyed past the radiation beam or a plurality of such beams may be mag reaction material, may flow by gravity away from the netically or optically split into a plurality of beams which are moving member. Atoms or particles so formed or separated directed along separate paths and are employed to either generate or enhance a plasma generated between electrodes by high temperature radiation may be employed to coat the moving substrate as a permanent coating or removed there or by other means. Fluidic gaseous or particulate solid or 30 from downstream of the coating location and collected. liquid matter may be stream directed through such plasma or What is claimed is:

aligned series of plasmas to heat the molecules thereof to 1. Amethod for effecting a reaction in a reaction chamber high temperatures at which they react or the atoms thereof comprising:

separate when the molecular bonds are broken or shattered by the high temperature. For example, various ores contain (a) feeding a plurality of reaction materials into a reaction ing metal or metals, when subjected to temperatures in the 35 chamber, including water;

range of 1700 degrees centigrade will have their metal atoms (b) generating a high temperature plasma within said separated from the molecules containing same and such reaction chamber, said plasma causing a reaction of metal may be collected by gravity, centrifugal separation, dissociating said water into products comprising hydro filtration, magnetic means or a combination thereof, in a continuous formation and separation process. A single radia gen and oxygen atoms; and tion beam, such as a laser or electron beam generated as (c) removing the products of the reaction from said described may be passed between a plurality of electrode reaction chamber;

pairs properly aligned to permit matter to be reacted on to wherein said feeding and generating of said temperature pass therethrough and be reacted on by the radiation of the are effected under computer control. plasma and the radiation beam applied thereto to effect 45 2. A method in accordance with claim 1 further compris controlled chemical and physical reactions as described. The ing the step of using one or more of said reaction products pressure or force of the radiation beam may be employed to to fuel the plasma.

separate/select particles of reaction material, molecules or 3. A method in accordance with claim 2 wherein the step atoms thereof, from other gaseous or particulate matter by of generating includes the step of burning said hydrogen force flowing same along a path or paths to effect such 50 atOmS.

separation. Select atoms of the reaction material may react 4. A method in accordance with claim 1 wherein the high tofa select wavelength or wavelengths or frequency of the temperature plasma is generated between electrodes. radiation beamed to the reaction Zone or zones while other 5. A method in accordance with claim 4 further compris atoms or molecules of matter resulting from the high tem ing the step of generating an electrical potential across said perature reaction may be subjected to radiation force suffi 55 electrodes, which is controllably varied in voltage under the ciently different therefrom to effect radiation separation of control of said computer.

the products of the reaction by generating and separately 6. A method in accordance with claim 1 further compris directing the flows of different molecules and/or atoms of ing using a radiation beam to heat said plurality of materials matter to different locations within and/or exterior of the in said chamber.

reaction zone or chamber with laser beams of different wave 60 lengths.

Page 17

Disclaimer 5,628,881 - Jerome Lemelson. Incline Village. Nev. HIGH TEMPERATURE REACTION METHOD, Patent dated May 13, 1997. Disclaimer filed May 05, 2004, hy the inventor, Jerome emelson. Herchy declaim the terminal sixty (60) months of the above referenced patent. Official Gaiette May 24, 2005)