patent · US4734152A
Dry etching patterning of electrical and optical materials
29 March 1988
Indexed reference — no copy held
This patent is cited by material in the archive, so it is indexed here by number, title and inventor. The archive holds no copy of its text.
Provenance
- Collection
- Patents citing this work
- Patent office record
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- Source
- Google Patents citing-documents table
- Assignee
- Massachusetts Institute Of Technology
- Published
- 1988-03-29