patent · US4316791A
Device for chemical dry etching of integrated circuits
23 February 1982
Indexed reference — no copy held
This patent is cited by material in the archive, so it is indexed here by number, title and inventor. The archive holds no copy of its text.
Provenance
- Collection
- Patents citing this work
- Patent office record
- patents.google.com →
- Source
- Google Patents citing-documents table
- Assignee
- Office Nationale D'etudes Et De Recherches Aerospatiales
- Published
- 1982-02-23