patent · EP0546852A1
Methods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and films
16 June 1993
Indexed reference — no copy held
This patent is cited by material in the archive, so it is indexed here by number, title and inventor. The archive holds no copy of its text.
Provenance
- Collection
- Patents citing this work
- Patent office record
- patents.google.com →
- Source
- Google Patents citing-documents table
- Assignee
- Hughes Aircraft Company
- Published
- 1993-06-16