patent · EP0394692A3
Process and apparatus for coating a substrate in a plasma
31 July 1991
Indexed reference — no copy held
This patent is cited by material in the archive, so it is indexed here by number, title and inventor. The archive holds no copy of its text.
Provenance
- Collection
- Patents citing this work
- Patent office record
- patents.google.com →
- Source
- Google Patents citing-documents table
- Assignee
- Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V.
- Published
- 1991-07-31